GLOBALFOUNDRIES Fab 1 Greenhouse Gas (GHG) Disclosure

GLOBALFOUNDRIES Fab 1
Greenhouse Gas (GHG) Disclosure

 

2024 Fab 1 GHG EMISSIONS in MTCO2-e*

Total GHG Emissions(Scope 1 and Scope 2)362,196
GHG Emissions from CVD ProcessesPFC3,049
SF60
NF31,678
HFC0
GHG Emissions from Etch and Insitu ProcessesPFC14,788
SF6269
NF31,928
HFC1,098
GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids)20,053

*The IPCC 2019 Tier 2C emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4.