GlobalFoundries Fab 7
Greenhouse Gas (F-GHG) Disclosure
2023 Fab 7 F-GHG EMISSIONS in MTCO2-e*
| Total GHG Emissions(Scope 1 and Scope 2) | 613,473 | |
|
GHG Emissions from NF3 Remote Plasma Clean Processes
|
PFC | 2,515 |
| SF6 | 0 | |
| NF3 | 2,629 | |
| HFC | 0 | |
|
GHG Emissions from Etch and Insitu Processes
|
PFC | 152,523 |
| SF6 | 18,751 | |
| NF3 | 93,411 | |
| HFC | 25,660 | |
| GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids) | 4,480 | |
*The IPCC Tier 2B (2019) emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4.