GlobalFoundries Fab 7 Greenhouse Gas (GHG) Disclosure

GlobalFoundries Fab 7
Greenhouse Gas (F-GHG) Disclosure

2020 Fab 7 F-GHG EMISSIONS in MTCO2-e*

Total GHG Emissions(Scope 1 and Scope 2) 612,956
GHG Emissions from NF3 Remote Plasma Clean Processes
PFC 10,702
SF6 0
NF3 7,473
HFC 0
GHG Emissions from Etch and Insitu Processes
PFC 169,569
SF6 9,974
NF3 110,246
HFC 16,455
GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids) 16,753
*The IPCC Tier 2A emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4