GlobalFoundries Fab 7
Greenhouse Gas (F-GHG) Disclosure

2020 Fab 7 F-GHG EMISSIONS in MTCO2-e*

Total GHG Emissions(Scope 1 and Scope 2)612,956
GHG Emissions from NF3 Remote Plasma Clean Processes
PFC10,702
SF60
NF37,473
HFC0
GHG Emissions from Etch and Insitu Processes
PFC169,569
SF69,974
NF3110,246
HFC16,455
GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids)16,753
*The IPCC Tier 2A emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4