GlobalFoundries Fab 7Greenhouse Gas (F-GHG) Disclosure 2021 Fab 7 F-GHG EMISSIONS in MTCO2-e* Total GHG Emissions(Scope 1 and Scope 2) 667,770 GHG Emissions from NF3 Remote Plasma Clean Processes PFC 12,719 SF6 0 NF3 8,881 HFC 0 GHG Emissions from Etch and Insitu Processes PFC 194,520 SF6 11,467 NF3 131,005 HFC 20,414 GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids) 12,602 *The IPCC Tier 2A (2006) emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4.
