GlobalFoundries Fab 7Greenhouse Gas (F-GHG) Disclosure 2023 Fab 7 F-GHG EMISSIONS in MTCO2-e* Total GHG Emissions(Scope 1 and Scope 2) 613,473 GHG Emissions from NF3 Remote Plasma Clean Processes PFC 2,515 SF6 0 NF3 2,629 HFC 0 GHG Emissions from Etch and Insitu Processes PFC 152,523 SF6 18,751 NF3 93,411 HFC 25,660 GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids) 4,480 *The IPCC Tier 2B (2019) emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4.
