GLOBALFOUNDRIES Fab 1
温室气体(GHG)披露

可持续性特征

为低直接温室气体排放而设计。

Fab 1 in Dresden is one of the largest fabs in Europe, and yet it produces very low levels of perfluorocompound emissions, which include perfluorocarbons (PFCs), SF6, NF3, and hydrofluorocompounds (HFCs). Fab 1 was designed for extremely low emissions of these materials, which is accomplished by utilizing low-emission gases in Chemical Vapor Deposition (CVD) chamber cleaning, coupled with near-universal use of point-of-use abatement equipment for processes using perfluorocompounds.  

低碳能源供应。

Fab 1 is mainly powered by two specially designed, highly efficient trigeneration plants, along with a small fraction of electricity from the Dresden public grid. Energy Centers I and II burn natural gas to supply Fab 1 with electricity, with fab heating and cooling generated mainly from the trigeneration plants’ waste heat. Trigeneration is much more efficient than conventional coal or natural gas power plants. 

2022 Fab 1 GHG EMISSIONS in MTCO2-e*

温室气体排放总量（范围1和范围2）		339,434
CVD工艺的温室气体排放	PFC	3,423
	SF6	0
	NF3	2,007
	HFC	0
GHG Emissions from Etch and Insitu Processes	PFC	12,998
	SF6	335
	NF3	2,175
	HFC	2,651
使用FHTF（氟化传热液体）的温室气体排放		22,246

*使用了IPCC的2B级排放清单计算方法。按照行业标准惯例，当设备的指定销毁效率证明是合理的，即使该设备不消减_CF4，也会使用NF3默认销毁效率。